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Total Size:
30.0 MB
Info Hash:
6174506E515F5E5A729DE0CFEC2C5083BC3ED500
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Added:
March 15, 2026, 4:14 p.m.
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(Last updated: March 15, 2026, 4:15 p.m.)
| File | Size |
|---|---|
| Makabe T. Plasma Electronics. Applications in Microelectronic Device...3ed 2026.pdf | 30.0 MB |
NOTE
SOURCE: Makabe T. Plasma Electronics. Applications in Microelectronic Device...3ed 2026
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COVER
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MEDIAINFO
Textbook in PDF format
More than two decades have passed since the first edition of Plasma Electronics was published. Today, we are entering an era that demands increasingly sophisticated control and design of plasma sources and related surface technologies for micro- and nano-electronic device fabrication. Plasma technology, based on surface interactions, continues to expand into emerging fields including biotechnology, medical science, and environmental applications
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